| Cov yam ntxwv dav dav | |
| Kev ntsuas | Los ntawm txoj kev ntawm 20 um-pitch (0.0008 nti) kawm tiav iav. |
| iav thermal expansion coefficient | 8 ppm/K |
| Qhov tseeb | ± 5 hli (± 0.0002 ") ± 3 hli (± 0.00012 ") |
| Qhov ceev tshaj plaws | 120m / min |
| Kev vibration siab tshaj plaws | 20g ua |
| Tsiv thrust | <5 N |
| Ua haujlwm kub | 0 ° ... 50 ℃ |
| Cia kub | -20°...70 ℃ |
| Qhov hnyav | 0.25KG + 2.25KG / M |
| txheeb ze humidity | 20...70 ℃ |
| Kev tiv thaiv | IP53 (Standard) IP 64 (DIN 40050) siv lub zog siab |